我们拥有多台薄膜生长设备，包括氧化物分子束外延、分子束外延、脉冲激光沉积和一套包含生长和分析腔的联合系统；两台低温磁场扫描隧道显微镜，包括一台9T的低温扫描隧道显微镜和一台18T的稀释制冷机扫描隧道显微镜。此外，我们的合作课题组和公共测试平台提供了丰富的测量表征设备，包括PPMS, STEM, EELS, SQUID等。
We have several thin film growth facilities, containing OMBE, MBE, PLD and a combination system composed of growth chambers and analyses chambers. Specially, we hava two low-temperature magnetic STM systems, containing one 9T STM and one 18 T STM equipped with dilution refrigerator system. Besides, we have access to many advanced measurement facilities in the institute, such as PPMS, STEM, EELS, SQUID and so on.
氧化物分子束外延 (OMBE)
8 effusion cells, highest temperature 1000 ℃
Substrate is heated by laser
Base pressure is better than 5×10-9 Torr without bake
All software control system
Ozone system
脉冲激光沉积 (PLD)+原位表征系统 (at LSU)
Equipped with XPS/ARPES, STM and LED
Equipped with Torr RHEED
MBE-STM联合系统
Four-axis Pan-type STM head
Base temperature 1.2K, Megnetic fild 9T
3 effusion cells
稀释制冷STM系统
Five-axis Pan-type STM head
Base temperature 6mK, Megnetic fild 18T
Energy resolution better than 0.02 meV
PLD-2
Laser heating mode (up to1200℃)
Base pressure less than 3×10-10 Torr
6 target positions
最新设计的联合生长+表征系统
Three growth chambers, OMBE, MBE and PLD
Analyses system, SHG, etc.
In-situ sample transfer between different chambers
中国科学院物理研究所 Institute of Physics Chinese Academy of Sciences